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Fabrication Engineering at the Micro- and Nanoscale

Fabrication Engineering at the Micro- and Nanoscale

ISBN 9780199861224
Edition 4
Publication Date
Publisher Oxford University Press
Author(s)
Overview
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.
Overview
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

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