Semiconductor Devices: Physics and Technology
John Wiley & Sons Ltd
S M Sze
Publication Date :
1 Jan 2012
"Semiconductor Devices: Physics and Technology, Third Edition" is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.